Nzira yekugadzira polysilicon.

1. Loading

Isa iyo yakavharwa quartz crucible patafura yekutsinhanisa kupisa, wedzera silicon mbishi, wobva waisa midziyo yekudziya, midziyo yekudzivirira uye chivharo chevira, buritsa muchoto kudzikisa kudzvanywa muchoto kusvika 0.05-0.1mbar uye chengetedza vacuum. Isai argon segasi rinodzivirira kuchengetedza kudzvanywa muchoto kunenge kwakapoteredza 400-600mbar.

2. Kupisa

Shandisa girafu heater kupisa muviri wechoto, tanga waburitsa mwando wakaiswa pamusoro pezvikamu zvegraphite, insulation layer, silicon raw materials, nezvimwewo, wozopisa zvishoma nezvishoma kuti tembiricha yequartz crucible isvike 1200-1300.℃. Iyi nzira inotora 4-5h.

3. Kunyunguduka

Isai argon segasi rinodzivirira kuchengetedza kudzvanywa muchoto kunenge kwakapoteredza 400-600mbar. Zvishoma nezvishoma wedzera simba rekudziya kugadzirisa tembiricha mucrucible kusvika 1500℃, uye iyo silicon mbishi inotanga kunyunguduka. Chengetedza anenge 1500℃panguva yekunyunguduka kusvika kunyungudika kwapera. Iyi nzira inotora anenge 20-22 maawa.

4. Kukura kwekristaro

Mushure meiyo silicon mbishi yakanyungudutswa, simba rekudziya rinodzikiswa kuita kuti tembiricha yecrucible idonhe kusvika pa1420-1440.℃, inova nzvimbo yekunyunguduka kwesilicon. Ipapo iyo quartz crucible inofamba zvishoma nezvishoma ichidzika pasi, kana mudziyo wekudzivirira unosimuka zvishoma nezvishoma, kuitira kuti quartz crucible zvishoma nezvishoma inosiya nzvimbo yekudziya uye inoumba kupisa kwekuchinja pamwe nekwakapoteredza; panguva imwecheteyo, mvura inopfuudzwa mundiro inotonhorera kuderedza kutonhora kwekunyunguduka kubva pasi, uye crystalline silicon inotanga kuumbwa pasi. Munguva yekukura, iyo solid-liquid interface inogara yakamira yakafanana nendege yakachinjika kudzamara kukura kwekristaro kwapera. Iyi nzira inotora anenge 20-22 maawa.

5. Anealing

Mushure mekukura kwekristaro kwapera, nekuda kwekudziya kukuru kwekushisa pakati pepasi nepamusoro pekristaro, kushushikana kwekupisa kunogona kuvepo muingot, iyo iri nyore kutyora zvakare panguva yekupisa kwesilicon wafer uye kugadzirira kwebhatiri. . Nokudaro, mushure mekukura kwekristal kwapera, iyo silicon ingot inochengetwa pedyo nekunyunguduka kwemaawa 2-4 kuti iite kutonhora kwesilicon ingot yunifomu uye kuderedza kupisa kwemhepo.

6. Kutonhodza

Mushure mekunge ingot yesilicon yanyura muchoto, dzima simba rekudziya, simudza mudziyo wekudzivirira kupisa kana kudzikisa zvachose ingot yesilicon, uye isa kuyerera kukuru kwe argon gasi muchoto kuderedza zvishoma nezvishoma tembiricha yesilicon ingot kusvika pedyo. kamuri tembiricha; panguva imwecheteyo, gasi rinomanikidza muchoto zvishoma nezvishoma rinokwira kusvikira rasvika kumhepo yemhepo. Izvi zvinotora anenge maawa gumi.